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Motorola Sensor Device Data
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The MPX10 and MPXV10GC series devices are silicon piezoresistive pressure sensors
providing a very accurate and linear voltage output — directly proportional to the applied
pressure. These standard, low cost, uncompensated sensors permit manufacturers to
design and add their own external temperature compensation and signal conditioning
networks. Compensation techniques are simplified because of the predictability of
Motorola’s single element strain gauge design. Figure 1 shows a schematic of the internal
circuitry on the stand–alone pressure sensor chip.
Features
Low Cost
Patented Silicon Shear Stress Strain Gauge Design
Ratiometric to Supply Voltage
Easy to Use Chip Carrier Package Options
Differential and Gauge Options
Durable Epoxy Unibody Element or Thermoplastic
(PPS) Surface Mount Package
Application Examples
Air Movement Control
Environmental Control Systems
Level Indicators
Leak Detection
Medical Instrumentation
Industrial Controls
Pneumatic Control Systems
Robotics
Figure 1. Uncompensated Pressure
Sensor Schematic
3
SENSING
ELEMENT
2
4
+ Vout
– Vout
+ VS
1
GND
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The output voltage of the differential or gauge sensor increases with increasing pressure
applied to the pressure side (P1) relative to the vacuum side (P2). Similarly, output voltage
increases as increasing vacuum is applied to the vacuum side (P2) relative to the pressure
side (P1).
SEMICONDUCTOR TECHNICAL DATA
0 to 10 kPa (0–1.45 psi)
35 mV FULL SCALE SPAN
(TYPICAL)
NOTE: Pin 1 is noted by the notch in
the lead.
PIN NUMBER
MPX10D
CASE 344
MPX10DP
CASE 344C
1
2
Gnd
+Vout
3
4
VS
–Vout
UNIBODY PACKAGE
SMALL OUTLINE PACKAGE
MPXV10GC6U
CASE 482A
MPXV10GC7U
CASE 482C
PIN NUMBER
1
2
3
Gnd
+Vout
Vs
5
6
7
N/C
N/C
N/C
4
–Vout
8
N/C
NOTE: Pin 1 is noted by the notch in
the lead.
REV 10
F
Freescale Semiconductor, Inc.
n
.