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Motorola Sensor Device Data
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The MPX2010/MPXV2010G series silicon
piezoresistive pressure sensors provide a very
accurate and linear voltage output — directly
proportional to the applied pressure. These sensors
house a single monolithic silicon die with the strain
gauge and thin–film resistor network integrated on
each chip. The sensor is laser trimmed for precise
span, offset calibration and temperature
compensation.
Features
Temperature Compensated over 0
°
C to +85
°
C
Ratiometric to Supply Voltage
Differential and Gauge Options
Application Examples
Respiratory Diagnostics
Air Movement Control
Controllers
Pressure Switching
Figure 1 shows a block diagram of the internal
circuitry on the stand–alone pressure sensor chip.
Figure 1. Temperature Compensated and Calibrated
Pressure Sensor Schematic
VS
3
SENSING
ELEMENT
THIN FILM
TEMPERATURE
COMPENSATION
AND
CALIBRATION
CIRCUITRY
2
4
Vout+
Vout–
1
GND
VOLTAGE OUTPUT versus
APPLIED DIFFERENTIAL PRESSURE
The output voltage of the differential or gauge sensor
increases with increasing pressure applied to the
pressure side (P1) relative to the vacuum side (P2).
Similarly, output voltage increases as increasing vacu-
um is applied to the vacuum side (P2) relative to the
pressure side (P1).
Preferred
devices are Motorola recommended choices for future use and
best overall value.
SEMICONDUCTOR TECHNICAL DATA
SMALL OUTLINE PACKAGE
SURFACE MOUNT
UNIBODY PACKAGE
MPX2010GP
CASE 344B
MPX2010GSX
CASE 344F
PIN NUMBER
NOTE: Pin 1 is noted by the notch in
the lead.
1
2
3
Gnd
+Vout
VS
–Vout
5
6
7
N/C
N/C
N/C
4
8
N/C
MPX2010D
CASE 344
MPX2010DP
CASE 344C
MPX2010GS
CASE 344E
MPXV2010DP
CASE 1351
MPXV2010GP
CASE 1369
COMPENSATED
PRESSURE SENSOR
0 to 10 kPa (0 to 1.45 psi)
FULL SCALE SPAN: 25 mV
Motorola Preferred Device
PIN NUMBER
1
2
Gnd
+Vout
3
4
VS
–Vout
NOTE: Pin 1 is noted by the notch in
the lead.
REV 9
F
Freescale Semiconductor, Inc.
n
.