1
Motorola, Inc. 1997
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The MPX5050 series piezoresistive transducer is a state–of–the–art monolithic silicon
pressure sensor designed for a wide range of applications, but particularly those
employing a microcontroller or microprocessor with A/D inputs. This patented, single
element transducer combines advanced micromachining techniques, thin–film metalliza-
tion, and bipolar processing to provide an accurate, high level analog output signal that
is proportional to the applied pressure.
Features
2.5% Maximum Error over 0
°
to 85
°
C
Ideally suited for Microprocessor or Microcontroller–Based Systems
Temperature Compensated Over – 40
°
to +125
°
C
Patented Silicon Shear Stress Strain Gauge
Durable Epoxy Unibody Element
Easy–to–Use Chip Carrier Option
VS
3
X–ducer
SENSING
ELEMENT
1
Vout
2
GND
THIN FILM
TEMPERATURE
COMPENSATION
AND
GAIN STAGE #1
GAIN STAGE #2
AND
GROUND
REFERENCE
SHIFT CIRCUITRY
PINS 4, 5 AND 6 ARE NO CONNECTS
Figure 1. Fully Integrated Pressure Sensor Schematic
MAXIMUM RATINGS(1)
Parametrics
Symbol
Value
Unit
Overpressure(2) (P1 > P2)
Burst Pressure(2) (P1 > P2)
Pmax
Pburst
Tstg
TA
200
kPa
700
kPa
Storage Temperature
–40
°
to +125
°
°
C
Operating Temperature
–40
°
to +125
°
°
C
1. TC = 25
°
C unless otherwise noted.
2. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
Senseon and X–ducer are trademarks of Motorola, Inc.
Order this document
by MPX5050/D
SEMICONDUCTOR TECHNICAL DATA
OPERATING OVERVIEW
INTEGRATED
PRESSURE SENSOR
0 to 50 kPa (0 to 7.25 psi)
0.2 to 4.7 Volts Output
NOTE: Pin 1 is the notched pin.
PIN NUMBER
NOTE: Pins 4, 5, and 6 are internal
device connections. Do not connect
to external circuitry or ground.
BASIC CHIP CARRIER
ELEMENT
CASE 867–08, STYLE 1
DIFFERENTIAL PORT OPTION
CASE 867C–05, STYLE 1
1
2
3
Vout
Grd
VS
4
5
6
N/C
N/C
N/C
REV 3