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參數(shù)資料
| 型號： | MPX906D |
| 廠商： | MOTOROLA INC |
| 元件分類： | 壓力傳感器 |
| 英文描述： | 0 to 6 kPa (0 to 24 in. H2O) WATER VAPOR COMPATIBLE 20 mV FULL SCALE SPAN (TYPICAL) |
| 中文描述： | DIFFERENTIAL, PEIZORESISTIVE PRESSURE SENSOR, 0-0.87Psi, 2%, -20-20mV, ROUND, THROUGH HOLE MOUNT |
| 封裝： | PLASTIC, UNIBODY PACKAGE-6 |
| 文件頁數(shù)： | 3/6頁 |
| 文件大?。?/td> | 114K |
| 代理商： | MPX906D |
3
Motorola Sensor Device Data
TEMPERATURE COMPENSATION
Figure 2 shows the output characteristics of the MPX906D
series at 25
°
C.
The X–ducer piezoresistive pressure sensor element is a
semiconductor device which gives an electrical output signal
proportional to the pressure applied to the device. This de-
vice uses a unique transverse voltage diffused semiconduc-
tor strain gauge which is sensitive to stresses produced in a
thin silicon diaphragm by the applied pressure.
Because this strain gauge is an integral part of the silicon
diaphragm, there are no temperature effects due to differ-
ences in the thermal expansion of the strain gauge and the
diaphragm, as are often encountered in bonded strain gauge
pressure sensors. However, the properties of the strain
gauge itself are temperature dependent, requiring that the
device be temperature compensated if it is to be used over
an extensive temperature range.
Temperature compensation and offset calibration can be
achieved rather simply with additional resistive components.
Several approaches to external temperature compensa-
tion over both –40 to +125
°
C and 0 to +80
°
C ranges are
presented in Motorola Applications Note AN840.
LINEARITY
Linearity refers to how well a transducer’s output follows
the equation: Vout = Voff + sensitivity x P over the operating
pressure range (Figure 3). There are two basic methods for
calculating nonlinearity: (1) end point straight line fit or (2) a
least squares best line fit. While a least squares fit gives the
“best case” linearity error (lower numerical value), the cal-
culations required are burdensome.
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user. Motorola’s
specified pressure sensor linearities are based on the end
point straight line method measured at the midrange
pressure.
Figure 2. Output versus Pressure Differential
Figure 3. Linearity Specification Comparison
Figure 4. Cross–Sectional Diagram (not to scale)
OFFSET
(VOFF)
70
O
60
50
40
30
20
10
0
0
MAX
POP
SPAN
(VFSS)
PRESSURE (kPA)
ACTUAL
THEORETICAL
LINEARITY
PRESSURE DIFFERENTIAL (mmH20)
O
5
0
100
200
300
400
0
–10
–5
–15
–20
–25
500
600
VS = 3 Vdc
P2 > P1
ééééééééééé
ééééééééééé
ééééééééééé
ééééééééééé
ééééééééééé
P2
SILICONE
DIE COAT
WIRE BOND
LEAD FRAME
DIE
STAINLESS STEEL
METAL COVER
EPOXY CASE
RTV DIE
BOND
AMBIENT (P1) SIDE
25
°
C
0
°
C
85
°
C
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