3–52
Motorola Sensor Device Data
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MAXIMUM RATINGS(NOTE)
Rating
Symbol
Value
Unit
Maximum Pressure (Backside)
Pmax
Tstg
TA
125
PSI
Storage Temperature
–25 to +85
°
C
Operating Temperature
+15 to +40
°
C
NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device.
OPERATING CHARACTERISTICS
(VS = 6 Vdc, TA = 25
°
C unless otherwise noted)
Characteristics
Symbol
Min
Typ
Max
Unit
Pressure Range
Supply Voltage(7)
POP
VS
Io
Voff
—
0
—
300
mmHg
—
6.0
10
Vdc
Supply Current
—
1.0
—
mAdc
Zero Pressure Offset
–0.75
—
0.75
mV
Sensitivity
Full Scale Span(1)
Linearity + Hysteresis(2)
Accuracy(9) VS = 6 V, P = 101 to 200 mmHg
Accuracy(9) VS = 6 V, P = 201 to 300 mmHg
Temperature Effect on Sensitivity
Temperature Effect on Full Scale Span(3)
Temperature Effect on Offset(4)
4.95
5.0
5.05
μ
V/V/mmHg
VFSS
—
2.976
3.006
3.036
mV
– 1.5
—
1.5
%VFSS
%
—
– 1.5
—
1.5
—
– 3.0
—
3.0
%
TCS
–0.1
—
+0.1
%/
°
C
TCVFSS
TCVoff
Zin
Zout
RCAL
tR
–0.1
—
+0.1
%/
°
C
–9.0
—
+9.0
μ
V/
°
C
Input Impedance
1800
—
4500
Output Impedance
RCAL (150 k
)(8)
Response Time(5)
(10% to 90%)
270
—
330
97
100
103
mmHg
—
1.0
—
ms
Temperature Error Band
Stability(6)
—
0
—
85
°
C
—
—
±
0.5
—
%VFSS
NOTES:
1. Measured at 6.0 Vdc excitation for 100 mmHg pressure differential. VFSS and FSS are like terms representing the algebraic difference
between full scale output and zero pressure offset.
2. Maximum deviation from end–point straight line fit at 0 and 200 mmHg.
3. Slope of end–point straight line fit to full scale span at 15
°
C and +40
°
C relative to +25
°
C.
4. Slope of end–point straight line fit to zero pressure offset at 15
°
C and +40
°
C relative to +25
°
C.
5. For a 0 to 300 mmHg pressure step change.
6. Stability is defined as the maximum difference in output at any pressure within POP and temperature within +10
°
C to +85
°
C after:
a. 1000 temperature cycles, –40
°
C to +125
°
C.
b. 1.5 million pressure cycles, 0 to 300 mmHg.
7. Recommended voltage supply: 6 V
±
0.2 V, regulated. Sensor output is ratiometric to the voltage supply. Supply voltages above +10 V may
induce additional error due to device self–heating.
8. Offset measurement with respect to the measured sensitivity when a 150k ohm resistor is connected to VS and S+ output.
9. Accuracy is calculated using the following equation:
Errorp = {[Vp – Offset)/(SensNom*VEX)]–P}/P
Where:
Vp = Actual output voltage at pressure P in microvolts (
μ
V)
Offset = Voltage output at P = 0mmHg in microvolts (
μ
V)
SensNom = Nominal sensitivity = 5.01
μ
V/V/mmHg
VEX = Excitation voltage
P = Pressure applied to the device
F
Freescale Semiconductor, Inc.
n
.