參數(shù)資料
型號(hào): TSC87251G2D-L16CED
廠商: ATMEL CORP
元件分類: 微控制器/微處理器
英文描述: B/16-BIT MICROCONTROLLER WITH SERIAL COMMUNICATION INTERFACES
中文描述: 16-BIT, OTPROM, 16 MHz, MICROCONTROLLER, PQFP44
封裝: 10 X 10 MM, PLASTIC, VQFP-44
文件頁(yè)數(shù): 13/28頁(yè)
文件大?。?/td> 153K
代理商: TSC87251G2D-L16CED
Qualpack TSC87251G2D
Rev. 0 – October 1999
13
3.3 Wafer Process Qualification
3.3.1 Process Module Reliability
This chapter contains all the information relative to the reliability of the SCMOS3 technology. Results
presented in the following sections concern the reliability of the basic process steps that build up the
technology.
3.3.1.1 Hot carrier qualification
STATIC NMOS DEGRADATION
Channel length in μm
Process corner
Substrate current in μA/μm
VD=5.5v, VG=2.25v
Substrate current in μA/μm
VD=3.6v, VG=1.6v
Lifetime in seconds for 10% shift of
Gm at VD=5.5v
Lifetime in seconds for 10% shift of
Gm at VD=3.6v
0.5
Fast
17
0.55
Fast
15
0.6
Fast
13.4
0.65
Fast
12.1
0.7
Fast
11.1
0.5
Typical
14.7
0.35
0.3
0.25
0.22
0.2
0.3
3.2e3
3.7e3
4.2e3
4.7e3
5.2e3
3.8e3
8e7
10e7
12e7
14e7
16e7
10e7
STATIC PMOS DEGRADATION
Channel length in μm
Process corner
Substrate current in μA/μm
VD=5.5v, VG=2.25v
Substrate current in μA/μm
VD=3.6v, VG=1.25v
Lifetime in seconds for 10% shift of
Gm at VD=5.5v
Lifetime in seconds for 10% shift of
Gm at VD=3.6v
0.5
Fast
0.31
0.55
Fast
0.28
0.6
Fast
0.25
0.65
Fast
0.22
0.7
Fast
0.21
0.5
Typical
0.24
2.3e-3
1.9e-3
1.6e-3
1.4e-3
1.1e-3
1.6e-3
2.7e4
3.1e4
3.5e4
3.9e4
4.3e4
3.5e4
2e7
2.5e7
3e7
3.8e7
4.6e7
3.2e7
EXPERIMENTAL RESULTS IN DYNAMIC MODE: hot carrier degradation effects on inverter
propagation time have been measured on oscillators running at 75 MHz at 7v and 6.5v. Accelerator
factor in voltage is then carried out and expected degradation laws at 5v and 3.3v derived. The following
graphs show the frequency degradation of oscillators running at 5v and 3.3v.
相關(guān)PDF資料
PDF描述
TSC87251G2D-L16CB B/16-BIT MICROCONTROLLER WITH SERIAL COMMUNICATION INTERFACES
TSC83251G2D-L16CB B/16-BIT MICROCONTROLLER WITH SERIAL COMMUNICATION INTERFACES
TSC83251G2D-L16CED B/16-BIT MICROCONTROLLER WITH SERIAL COMMUNICATION INTERFACES
TSC87251G2D B/16-BIT MICROCONTROLLER WITH SERIAL COMMUNICATION INTERFACES
TSC87251G2D-16CB B/16-BIT MICROCONTROLLER WITH SERIAL COMMUNICATION INTERFACES
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