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Motorola Sensor Device Data
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General Product Information
Performance, competitive price and application versatility
are just a few of the Motorola pressure sensor advantages.
PRESSURE SENSOR
APPLICATIONS VERSATILITY
For Motorola’s pressure sensors, new applications
emerge every day as engineers and designers realize that
they can convert their expensive mechanical pressure
sensors to Motorola’s lower–cost, semiconductor–based
devices. Applications include automotive and aviation,
industrial, healthcare and medical products and systems.
PERFORMANCE
The performance of Motorola pressure sensors is based
on its patented strain gauge design. Unlike the more
conventional pressure sensors which utilize four closely
matched resistors in a distributed Wheatstone bridge config-
uration, the device uses only a single piezoresistive element
ion implanted on an etched silicon diaphragm to sense the
stress induced on the diaphragm by an external pressure.
The extremely linear output is an analog voltage that is
proportional to pressure input and ratiometric with supply
voltage. High sensitivity and excellent long-term repeatability
make these sensors suitable for the most demanding
applications.
ACCURACY
Computer controlled laser trimming of on-chip calibration
and compensation resistors provide the most accurate
pressure measurement over a wide temperature range.
Temperature effect on span is typically
±
0.5% of full scale
over a temperature range from 0 to 85
°
C, while the effect on
offset voltage over a similar temperature range is a maximum
of only
±
1 mV.
UNLIMITED VERSATILITY
Choice of Specifications:
Motorola’s pressure sensors are available in pressure
ranges to fit a wide variety of automotive, healthcare,
consumer and industrial applications.
Choice of Measurement:
Devices are available for differential, absolute, or gauge
pressure measurements.
Choice of Chip Complexity:
Motorola’s pressure sensors are available as the basic
sensing element, with temperature compensation and cali-
bration, or with full signal conditioning circuitry included on
the chip. Uncompensated devices permit external compen-
sation to any degree desired.
Choice of Packaging:
Available as a basic element for custom mounting, or in
conjunction with Motorola’s designed ports, printed circuit
board mounting is easy. Our Small Outline and Super Small
Outline packaging options provide surface mount, low
profile, and top piston fit package selections. Alternate
packaging material, which has been designed to meet
biocompatibility requirements, is also available.
Curves of span and offset errors indicate the accuracy resulting from
on-chip compensation and laser trimming.
2
1.5
1
0.5
0
–0.5
–1
–1.5
–2
–50
S
TEMPERATURE (
°
C)
–25
0
25
50
75
100
125
150
ERROR BAND LIMIT
SPAN ERROR
OFFSET ERROR
ERROR BAND LIMIT
Figure 1. Typical Output versus Pressure
Differential
PRESSURE DIFFERENTIAL
70
60
40
50
30
O
20
10
00
10
20
30
40
50
60
70
80
90 100
2.0
4.0
6.0
8.0
10
12
14
16
–40
°
C
+25
°
C
+125
°
C
VS = 3.0 Vdc
P1 > P2
PSI
kPa
S
O
(
Figure 2. Temperature Error Band Limit and
Typical Span and Offset Errors
F
Freescale Semiconductor, Inc.
n
.